Thermal microactuators is one of a type of microactuators. Current thermal microactuators such as Bimorph has problem in moving into desired direction due to its motion are in arc motion. While Chevron has tendencies to deform in y-axis direction if the desired motion is in z-axis direction. Thus, this study were conducted to compare the performance of existing structures with new breed of structure which is inspired from serpentine structure. This study was conducted by using simulation from software ANSYS v15 as medium for collecting data such as temperature produced by each structure and total deformation with x, y, and z-axis directional deformation. In this study 4 structure has been draw by using Solidwork 2013. With three set of parameter which is 240µm x 1000µm, 240µm x 1500µm and 240µm x 2000µm. All four structure were named as Serpentine01, Serpentine02, Bimorph and Chevron. From all of the result obtained, characteristic of the optimum design parameter for Serpentine structure will be introduced in conclusion section.