The following paper introduces the Overall Material Efficiency (OME), a performance-measurement concept for material usage in semiconductor manufacturing. The OME breaks down’ the total material usage into main categories. The concept has proven useful to drive improvement in material management by highlighting areas for improvement, via tracking both the amount and cost of materials used in each category over time. The OME is also generic – the authors believe that the concept is relevant to all processes that involve production.

Keywords: overall material efficiency, material efficiency, material productivity, material losses