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Unsupervised Learning-Based PHM for Predictive Maintenance and Optimal Configuration of Air Compressors in the Semiconductor Industry

Tai Ching Hung National Tsing Hua University

Kuo-Hao Chang Department of Industrial Engineering and Engineering Management , National Tsing Hua University

Jing-Wei Chen Industrial Technology Research Institute

Jing-Yao Jhang Industrial Technology Research Institute

15th Annual International Conference on Industrial Engineering and Operations Management