Track: Production Engineering

Abstract

This paper presents the elaboration of titanium dioxide TiO₂ nano-layers for different temperatures. The nano-layers are deposited by radio frequency (RF) magnetron sputtering technique. In this work the analyzed of temperature effect on the optical and surface condition properties are investigated using Scanning Electron Microscopy (SEM), Energy-Dispersive X-ray Spectroscopy (EDS), Atomic Force Microscopy (AFM) and UV–visible spectroscopy. The TiO2 nano-layers surface roughness range from 1.04 nm to 1.6 nm for 450°C and 300°C, respectively. UV–visible spectrophotometry characterization of the deposited TiO2 nano-layers show that the films gap varies according to the temperature variation with 3,6eV for T=300 and 3.8eV for T=450°C. We can deduce that the optical gap varies proportionally with the temperature variation. Otherwise, the EDS results imply the formation of TiO₂.